Laser Micromachining Examples
Laser Micromachining Product Development Examples
Translating an idea on paper into an actual product is a multi-step process that includes lasers as well as auxiliary and pre/post processes. This is best illustrated by the two examples below.
Example 1: Monolithic True 3-D Lymphatic Implant
Description
- Size: 1 mm overall, with 100 micron conduits
- Parts, masks made on calibrated stages
- YAG laser to make a contact-masks
- Alignment holes for point-to-point registration
- View ‘through-laser-lens’ and stereo microscope
Process I
- 193 nm Excimer- machining of PMMA (contact mask on top)
- 355 tripled YAG for high-speed release of parts from sheet
- Ultrasonic cleaner (Phosphoric acid, surfactant, 100 F) to remove metal slag deposited on polymer.
- Megasonics to remove finer particles (outsourced)
- Problem: FDA objects to fine metal particles on implants
Process II
- Switch to ceramic mask, Polyimide parts
- 248 nm Excimer- multi-step machining of Polyimide
- Benefits: No metal slag, increased throughput of 248 laser.
Example 2: Transmission Windows on metal-on-glass wafers
- Simple Process
- 2 inch wafers (10 nm gold layer)
- Requirement: Ablate 16 micron windows of metal at fiducial marks (make optically transparent)
- Process: YAG, no coolant, tip-tilt vacuum chuck
Successful Product Development Requires:
- Intricate knowledge of laser/supporting processes
- MicroProduct development life cycle experience.
- Plan for production while developing prototypes.
- Stable, repeatable, predictable-cost MicroProcess
As can be seen from the examples, processes can be simple, or they can turn out to be complex. When unexpected changes occur, it is good to have someone guide you through the process development phase.